The proposed text reference provides an engineering design approach to MEMS and microsystems, appropriate for professionals and senior level students. The design approach is supported by numerous examples, cases, and applied problems. The book is written for both Mechanical/Aerospace and Electrical engineering students and professionals.  It covers both sides of the technology by carefully explaining the electrical/electronic aspects while providing strong coverage of the mechanical side of MEMS, dual coverage that no other textbook provides.  This new edition presents new and expanded coverage of microfabrication and assembly & packaging technologies. There will be a new chapter covering nanotechnology nanoscale engineering.  A solutions manual will be provided.