The purpose of this book is to give the reader an introduction into the technological development, the physical background and the most important areas of micro- and nanooptics. The opening chapters on the physics of light are complemented by chapters on refractive and diffractive optical elements. The authors present different methods of lithographic and nonlithographic fabrication of miccrooptics and introduce the reader to characterization and testing of microoptics. The second part of the book is dedicated to optical Microsystems and MEMS, optical waveguide structures and optical nanostructures including photonic crystals and metamaterials. The book comes along with a chapter on the mathematical preliminaries, and each chapter contains explanatory remarks as well as questions and exercises.