The book deals with a wide range of catalytic chemical vapor deposition (Cat-CVD) and related technologies from fundamentals to applications including the design of Cat-CVD apparatuses. The authors review the analytical tools for elucidating the chemical reactions in Cat-CVD such as laser-induced fluorescence and deep ultra-violet absorption and explain in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently they give an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of the book are devoted to the design and operation of Cat-CVD apparatuses and the applications.